
BRONKHORST HIGH-TECH B.V.
ThecontrolvalveusedintheFLOW‐SMSseriesisastandard,direct
operatedsolenoidvalve(normallyopenedornormallyclosed),
operatedthroughthePID‐controlfunctiononthepc‐boardof the
floworpressuremeter.Thediameteroftheorificeunderthe
plungerisoptimisedforthecustomer’sspecification.
9.17.057 page 11
Controllersorvalvesmaynotoperatecorrectly,ifprocessconditionsvarytoomuch,becauseofthe
restrictionoftheorificeinthevalve.
InstructionsforreplacingaMassFlowMeter(MFM)or
MassFlowController(MFC)module:
MFC
- Removal
EnsurethatthesystemisdepressurisedbeforetakingFlow
moduleapart.
Thepowermustbeoffwhenremovingtheelectricalconnectors.
Loosenthe4bolts(M4)withhexagonheadcounterclockwiseto
releasetheFlowmodule.
- Replacement
Replacethegasketsdependingonthetype:FS‐200CV2xAS‐108,
FS‐201CV1xAS‐115and1xAS‐108,FS‐202CV1xAS‐118and1xAS‐108.
Viton,EPDMorKalrez.
Allwettedpartshavetobeabsolutelyclean,don’tuseoilor
greaseandavoiddust!
ReplacetheFlowmoduleandtightentheM4boltswithhexagon
headbyturningclockwise,tightencrosswisewith2,0Nm.
Reattachtheelectricalconnector.
NowtheFlowmodulehastobetestedforleakageandfunction.
MFM
AvailableMassFlowController/MassFlowMetermodules
Type Type Nominal
Range
Description
Controller(MFC) Meter(MFM) Range(basedonN2@1bara
FS‐200CV FS‐100C 005 0.06…3upto0,18…9mln/min
FS‐201CV FS‐101C 020 0.16…8upto0,6…30mln/min
FS‐201CV FS‐101C 050 0,4…20upto1,5…75mln/min
FS‐201CV FS‐101C 100 0,8…40upto3…150mln/min
FS‐201CV FS‐101C 200 1,6…80upto6…300mln/min
FS‐201CV FS‐101C 500 4…200upto15…750mln/min
FS‐201CV FS‐101C 1k0 8…400upto30…1500mln/min
FS‐201CV FS‐101C 2k0 16…800upto60…3000mln/min
FS‐201CV FS‐101C 5k0 0,04…2upto0,15…7,5ln/min
FS‐201CV FS‐101C 7k0 0,05…2.6upto0,2…10ln/min
FS‐202CV FS‐102C 10k 0.08…4upto0.3…15ln/min
FS‐202CV FS‐102C 20k 0,16…8upto0.6…30ln/min
FS‐202CV FS‐102C 35k 0,25…12.5upto1…50ln/min
2.13.4 Pressure modules
FLOW‐SMSpressuremeters/controllersrangefrom100mbarupto10bar,
measuringeitherabsolutepressureorgaugepressure,withaveryhighaccuracy
andrepeatability.Theinstrumentsareequippedwithadiaphragmbased
piezo‐resistivesensor.Pressurecontrollersareavailableasforwardcontroller
(P‐600series)andbackwardcontroller(P‐700series).
Theflowgoingthroughthepressurecontrollerdependsonupanddownstream
pressures,orificediameterofthevalveandthedensityofthefluid.
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