Bronkhorst FLOW-SMS Series Manual do Utilizador Página 11

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BRONKHORST HIGH-TECH B.V.
ThecontrolvalveusedintheFLOWSMSseriesisastandard,direct
operatedsolenoidvalve(normallyopenedornormallyclosed),
operatedthroughthePIDcontrolfunctiononthepcboardof the
floworpressuremeter.Thediameteroftheorificeunderthe
plungerisoptimisedforthecustomer’sspecification.
9.17.057 page 11
Controllersorvalvesmaynotoperatecorrectly,ifprocessconditionsvarytoomuch,becauseofthe
restrictionoftheorificeinthevalve.
InstructionsforreplacingaMassFlowMeter(MFM)or
MassFlowController(MFC)module:
MFC
- Removal
EnsurethatthesystemisdepressurisedbeforetakingFlow
moduleapart.
Thepowermustbeoffwhenremovingtheelectricalconnectors.
Loosenthe4bolts(M4)withhexagonheadcounterclockwiseto
releasetheFlowmodule.
- Replacement
Replacethegasketsdependingonthetype:FS200CV2xAS108,
FS201CV1xAS115and1xAS108,FS202CV1xAS118and1xAS108.
Viton,EPDMorKalrez.
Allwettedpartshavetobeabsolutelyclean,don’tuseoilor
greaseandavoiddust!
ReplacetheFlowmoduleandtightentheM4boltswithhexagon
headbyturningclockwise,tightencrosswisewith2,0Nm.
Reattachtheelectricalconnector.
NowtheFlowmodulehastobetestedforleakageandfunction.
MFM
AvailableMassFlowController/MassFlowMetermodules
Type Type Nominal
Range
Description
Controller(MFC) Meter(MFM)  Range(basedonN2@1bara
FS200CV FS100C 005 0.06…3upto0,18…9mln/min
FS201CV FS101C 020 0.16…8upto0,6…30mln/min
FS201CV FS101C 050 0,4…20upto1,5…75mln/min
FS201CV FS101C 100 0,8…40upto3…150mln/min
FS201CV FS101C 200 1,6…80upto6…300mln/min
FS201CV FS101C 500 4…200upto15…750mln/min
FS201CV FS101C 1k0 8…400upto30…1500mln/min
FS201CV FS101C 2k0 16…800upto60…3000mln/min
FS201CV FS101C 5k0 0,04…2upto0,15…7,5ln/min
FS201CV FS101C 7k0 0,05…2.6upto0,2…10ln/min
FS202CV FS102C 10k 0.08…4upto0.3…15ln/min
FS202CV FS102C 20k 0,16…8upto0.6…30ln/min
FS202CV FS102C 35k 0,25…12.5upto1…50ln/min
2.13.4 Pressure modules
FLOWSMSpressuremeters/controllersrangefrom100mbarupto10bar,
measuringeitherabsolutepressureorgaugepressure,withaveryhighaccuracy
andrepeatability.Theinstrumentsareequippedwithadiaphragmbased
piezoresistivesensor.Pressurecontrollersareavailableasforwardcontroller
(P600series)andbackwardcontroller(P700series).
Theflowgoingthroughthepressurecontrollerdependsonupanddownstream
pressures,orificediameterofthevalveandthedensityofthefluid.
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